Zero-defect sputter deposition metallization method for high volume manufacturing of grafted multilayer thin film modules

✍ Scribed by Swirbel, T.

• Book ID: 114560406
• Publisher: IEEE
• Year: 1993
• Tongue: English
• Weight: 370 KB
• Volume: 16
• Category: Article
• ISSN: 0148-6411
• DOI: 10.1109/33.214853