“Zeptofarad” (10-21 F) resolution capacitance sensor for scanning capacitance microscopy

✍ Scribed by Tran, T.; Oliver, D. R.; Thomson, D. J.; Bridges, G. E.

• Book ID: 115479603
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 584 KB
• Volume: 72
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1369637