Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology

✍ Scribed by F. Giannazzo; V. Raineri; S. Mirabella; E. Bruno; G. Impellizzeri; F. Priolo

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 399 KB
• Volume: 124-125
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2005.08.076