Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

✍ Scribed by P. Eyben; T. Janssens; W. Vandervorst

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 609 KB
• Volume: 124-125
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2005.08.049