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Zeolite LTA deposition on silicon wafer

โœ Scribed by P. Frontera; F. Crea; F. Testa; R. Aiello


Book ID
106424845
Publisher
Springer
Year
2007
Tongue
English
Weight
257 KB
Volume
14
Category
Article
ISSN
1380-2224

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Preferred growth of siliceous MEL zeolit
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Continuous and dense siliceous MEL type zeolite films were prepared by seeding methods on a silicon (1 0 0) substrate in the clear solution of TBAOH-TEOS-H 2 O. The effects of the precursor layer adsorbed on the substrate surface, the content of water in the reactant solution, the reaction period an