Yttrium oxide/silicon dioxide: a new dielectric structure for VLSI/ULSI circuits

✍ Scribed by Manchanda, L.; Gurvitch, M.

• Book ID: 115529116
• Publisher: IEEE
• Year: 1988
• Tongue: English
• Weight: 287 KB
• Volume: 9
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/55.682