IVB-7 yttrium oxide/silicon dioxide: A new dielectric structure for VLSI/ULSI

✍ Scribed by Manchanda, L.; Gurvitch, M.

• Book ID: 114596174
• Publisher: IEEE
• Year: 1987
• Tongue: English
• Weight: 172 KB
• Volume: 34
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1987.23291