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Young's Modulus of Silicon Nitride Fibers

โœ Scribed by TADASHI MARWAMA; HIROSHIGE SUZUK


Book ID
110814075
Publisher
John Wiley and Sons
Year
1975
Tongue
English
Weight
264 KB
Volume
58
Category
Article
ISSN
0002-7820

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Youngโ€™s modulus and residual stress of D
โœ E. Cianci; A. Coppa; V. Foglietti ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 481 KB

This paper addresses the simultaneous determination of the Young's modulus and the residual stress of thin silicon nitride films deposited by dual frequency plasma enhanced chemical vapour deposition, to be used in the fabrication of free-standing MEMS membranes. Load-deflection tests of circular me