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Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

✍ Scribed by Ming Qin; Vincent M. C. Poon

Book ID: 110240284
Publisher: Springer
Year: 2000
Tongue: English
Weight: 117 KB
Volume: 19
Category: Article
ISSN: 0261-8028
DOI: 10.1023/a:1006729009092

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📜 SIMILAR VOLUMES

[IEEE 2000 IEEE Hong Kong Electron Devic

[IEEE 2000 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China (24 June 2000)] Proceedings 2000 IEEE Hong Kong Electron Devices Meeting (Cat. No.00TH8503) - Measurement of Young's modulus of nickel silicide film by a surface profiler

✍ Ming Qin, ; Yuen, C.Y.; Poon, M.C.; Chan, W.Y. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 285 KB