XYΘ actuators using piezoelectric and electromagnetic actuators

✍ Scribed by Haruna Kato; Kazuaki Hayakawa; Akihiro Torii; Akiteru Ueda

• Book ID: 101293891
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 250 KB
• Volume: 131
• Category: Article
• ISSN: 0424-7760
• DOI: 10.1002/(sici)1520-6416(200006)131:4<44::aid-eej6>3.0.co;2-r

✦ Synopsis

Microactuators with multiple degrees of freedom, which can provide many benefits in precision engineering, are in demand for industrial applications. We propose two new actuators (Y-type and '-type) which can move in the x, y, and T directions. They are combinations of piezoelectric and electromagnetic actuators. The proposed actuators realize high resolution via the piezoelectric actuators. We describe the structure and principle of the proposed actuators, and discuss their feasibility. A resolution of 70 nm in the x direction and of 0.5 Prad in the T direction was obtained with the Y-type actuator. A resolution of 90 nm in the x direction and of 0.6 Prad in the T direction was obtained with the '-type actuator.