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Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators

✍ Scribed by Xie, Yangqiu; Tan, Yonghong; Dong, Ruili

Book ID: 120245491
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 631 KB
Volume: 18
Category: Article
ISSN: 1083-4435
DOI: 10.1109/TMECH.2012.2187794

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