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XPS study of ion-implanted arsenic in a-Si(H)

✍ Scribed by J. Zemek; I. Akimchenko; V. Krasnopevtsev

Book ID: 104173019
Publisher: Elsevier Science
Year: 1984
Weight: 347 KB
Volume: 11
Category: Article
ISSN: 0165-1633
DOI: 10.1016/0165-1633(84)90049-2

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