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XPS studies on Mn/SiO cermet thin films

✍ Scribed by J. Beynon; B. R. Orton; T. Purser; M. A. R. Sarkar


Publisher
Springer
Year
1985
Tongue
English
Weight
123 KB
Volume
4
Category
Article
ISSN
0261-8028

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The composition-depth profile studies using x-ray photoelectron spectroscopy (XPS) are carried out for Mn thin films grown on GaAs(001) substrates at different substrate temperatures. The experimental results show that due to the interdiffusion and chemical reaction, an Mn-Ga-As mixed layer is forme