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XPS studies on SiOx thin films

✍ Scribed by R. Alfonsetti; L. Lozzi; M. Passacantando; P. Picozzi; S. Santucci

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 342 KB
Volume: 70-71
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90431-a

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