XPS and XRR studies on microstructures and interfaces of DLC films deposited by FCVA method

✍ Scribed by C.K. Park; S.M. Chang; H.S. Uhm; S.H. Seo; J.S. Park

• Book ID: 114085478
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 532 KB
• Volume: 420-421
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(02)00750-2