XPS analysis of carrier trapping phenomena in ultrathin SiO2 film formed on Si substrate

✍ Scribed by K Hirose; S Kawashiri; T Hattori

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 110 KB
• Volume: 234
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2004.05.019