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X-ray video camera with 10 μm spatial resolution

✍ Scribed by Koch, Andreas; Riekel, Christian


Book ID
120972648
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
775 KB
Volume
67
Category
Article
ISSN
0034-6748

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Multielement X-ray row detector on GaAs
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The multielement X-ray row detector with pitch of 108 mm was made on epitaxial GaAs (p þ -n-n 0 -n þ ) structures by isotropic etching in solution HCl-KBrO 3 -H 2 O. Separation of signals from the near-by detectors is achieved by built-in guard ring on each pixel. The spatial response of the detecto