✦ LIBER ✦
Multielement X-ray row detector on GaAs with spatial resolution of 108 μm
✍ Scribed by V.F. Dvoryankin; Yu.M. Dikaev; A.I. Krikunov; T.M. Panova; A.A. Telegin
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 189 KB
- Volume
- 531
- Category
- Article
- ISSN
- 0168-9002
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✦ Synopsis
The multielement X-ray row detector with pitch of 108 mm was made on epitaxial GaAs (p þ -n-n 0 -n þ ) structures by isotropic etching in solution HCl-KBrO 3 -H 2 O. Separation of signals from the near-by detectors is achieved by built-in guard ring on each pixel. The spatial response of the detectors was evaluated.