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X-ray scattering study of hydrogen implantation in silicon

✍ Scribed by Sousbie, Nicolas; Capello, Luciana; Eymery, Joël; Rieutord, François; Lagahe, Chrystelle


Book ID
121015901
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
1007 KB
Volume
99
Category
Article
ISSN
0021-8979

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