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X-ray photoelectron spectroscopic study of the interactions of CF+ ions with gallium arsenide

โœ Scribed by L. R. Williston

Book ID
121846126
Publisher
AVS (American Vacuum Society)
Year
1993
Tongue
English
Weight
781 KB
Volume
11
Category
Article
ISSN
0734-2101

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Laser-enhanced oxidation of gallium arsenide surfaces has been investigated. The oxidation was performed either in air or in pure water at room temperature. Light at ultraviolet wavelengths was found to enhance the oxidation rate much more strongly than at visible wavelengths. The oxidation in air l