✦ LIBER ✦

Ultraviolet-light-enhanced oxidation of gallium arsenide surfaces studied by X-ray photoelectron and auger electron spectroscopy

✍ Scribed by C.F. Yu; D.V. Podlesnik; M.T. Schmidt; H.H. Gilgen; R.M. Osgood Jr.

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 477 KB
Volume: 130
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(86)80473-0

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✦ Synopsis

Laser-enhanced oxidation of gallium arsenide surfaces has been investigated. The oxidation was performed either in air or in pure water at room temperature. Light at ultraviolet wavelengths was found to enhance the oxidation rate much more strongly than at visible wavelengths. The oxidation in air leaves the surface almost stoichiometric, whereas the treatment in pure water results in a gallium-rich surface.