X-ray diffraction measurement of residua
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Farid Takali; Anouar Njeh; Hartmut Fuess; Mohamed HΓ©di Ben Ghozlen
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Article
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2011
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Elsevier Science
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English
β 463 KB
Piezoelectric thin films on high acoustic velocity non piezoelectric substrates, such as ZnO and AlN, deposited on diamond or sapphire substrates, are attractive for high frequency and low-loss surface acoustic wave devices. In this work, ZnO films were epitaxialy grown on R-Al 2 O 3 and C-Al 2 O 3