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X-ray microcalorimeter arrays fabricated by surface micromachining

✍ Scribed by Hilton, G.C; Beall, J.A; Deiker, S; Vale, L.R; Doriese, W.B; Beyer, Jörn; Ullom, J.N; Reintsema, C.D; Xu, Y; Irwin, K.D

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
248 KB
Volume
520
Category
Article
ISSN
0168-9002

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