Progress in fabrication of microcalorimeter arrays: X-ray absorbers and high-density stripline wiring
✍ Scribed by Marcel P. Bruijn; Marcel L. Ridder; Eric Krouwer; Henk F.C. Hoevers; Piet A.J. de Korte; Jan van der Kuur
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 143 KB
- Volume
- 559
- Category
- Article
- ISSN
- 0168-9002
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✦ Synopsis
We report on advances in the fabrication technology of an array of microcalorimeters, to be used in future X-ray spectroscopic space missions. An optimization study was done to form high packing factor, mushroom-shaped, Bi absorbers by evaporation and sputter deposition techniques. The electrical, mechanical and thermal properties of the absorbers were characterized. We show the feasibility of wiring a 250 mm pitch, 32 Â 32 pixel array with low-inductance striplines. A design for a prototype array has been made and fabrication is in progress.