X-ray irradiation at subthreshold energies modifies the surface micromorphology of epitaxial silicon layers on sapphire

✍ Scribed by A. N. Kiselev; V. A. Perevoshchikov; V. D. Skupov; D. O. Filatov

• Book ID: 110128095
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2001
• Tongue: English
• Weight: 138 KB
• Volume: 27
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1405240