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A Difference in the change of parameters of silicon-on-sapphire structures upon X-ray irradiation from the sides of epitaxial layer and substrate

✍ Scribed by A. N. Kiselev; V. A. Perevoshchikov; V. D. Skupov; D. O. Filatov

Book ID: 110137473
Publisher: SP MAIK Nauka/Interperiodica
Year: 2003
Tongue: English
Weight: 422 KB
Volume: 29
Category: Article
ISSN: 1063-7850
DOI: 10.1134/1.1639445

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