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X-ray interference topography investigation of Si/Ge x Si 1 x /Si(001) heterosystem

✍ Scribed by Fedorov, A A; Trukhanov, E M; Vasilenko, A P; Kolesnikov, A V; Revenko, M A

Book ID
120572224
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
422 KB
Volume
36
Category
Article
ISSN
0022-3727

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Detailed characterization of extremely thin buried Ge films of monolayer thickness (6 layers) was performed by combination of grazing incidence X-ray reflectivity, crystal truncation rods, and X-ray standing waves. Grazing incidence reflectivity and crystal truncation rods are used to determine the