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An X-ray scattering study of SiOx/Si/Ge(001)

✍ Scribed by S.D. Kosowsky; C.-H. Hsu; P.S. Pershan; J. Bevk; B.S. Freer


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
526 KB
Volume
84
Category
Article
ISSN
0169-4332

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Detailed characterization of extremely thin buried Ge films of monolayer thickness (6 layers) was performed by combination of grazing incidence X-ray reflectivity, crystal truncation rods, and X-ray standing waves. Grazing incidence reflectivity and crystal truncation rods are used to determine the