X-ray evaluation of microroughness of mechanochemically polished silicon surfaces: Sakata, Osami; Nikulin, Andrei Y.; Hashizume, Hiroo. Japanese Journal of Applied Physics, Part 2: Letters. Apr 15; 32(4B): L616–L619

• Book ID: 107889257
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 218 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90120-1