X-ray evaluation of microroughness of mechanochemically polished silicon surfaces: Sakata, O; Nikulin, A. Y; Hashizume, H. Japanese Journal of Applied Physics, Part 2 (Letters). 1993 Apr

• Book ID: 103532020
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 46 KB
• Volume: 15
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(93)90212-s