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X-ray diffraction study of the effect of annealing temperature on the phase and structural states of Fe79Zr10N11films produced by magnetron sputtering

✍ Scribed by E. N. Sheftel’; S. I. Utitskikh; A. N. Ivanov; M. Inoue; R. Fujikawa


Book ID
110177667
Publisher
SP MAIK Nauka/Interperiodica
Year
2008
Tongue
English
Weight
270 KB
Volume
105
Category
Article
ISSN
0031-918X

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph