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X-ray characterization of surfaces irradiated with highly charged ions

✍ Scribed by J.P. Briand; M. Benhachoum


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
371 KB
Volume
267
Category
Article
ISSN
0168-583X

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We have observed positive secondary ion mass spectra from highly oriented pyrolytic graphite (HOPG) and hydrogen terminated Si (Si-H) surfaces irradiated with highly charged ions (HCIs). In the spectra from HOPG irradiated by HCIs of Xe q+ , carbon clusters up to C ΓΎ 5 were observed in addition to h