Secondary ion emission from solid surfaces irradiated with highly charged ions

✍ Scribed by Masahide Tona; Kazuo Nagata; Satoshi Takahashi; Nobuyuki Nakamura; Nobuo Yoshiyasu; Makoto Sakurai; Chikashi Yamada; Shunsuke Ohtani

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 204 KB
• Volume: 232
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.03.053

✦ Synopsis

We have observed positive secondary ion mass spectra from highly oriented pyrolytic graphite (HOPG) and hydrogen terminated Si (Si-H) surfaces irradiated with highly charged ions (HCIs). In the spectra from HOPG irradiated by HCIs of Xe q+ , carbon clusters up to C þ 5 were observed in addition to hydrogenated carbon cluster peaks. On the other hand, in the spectra from the Si(1 1 1)-H, peaks of H + and H þ 2 were detected dominantly with weak signals for C + and Si + . Strong dependence of peak intensities of these spectra on q were also observed. It is shown that sputtering phenomena are closely related to deposition of potential energy of HCIs onto the surfaces and the HCI-probe can be applied to the high sensitivity surface analysis.