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X-ray analysis of heat-treated titanium nitride films

✍ Scribed by V. Valvoda; R. Černý; R. Kužel Jr.; L. Dobiášová; J. Musil; V. Poulek; J. Vyskočil

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 505 KB
Volume: 170
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90725-6

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