Wireless micromachined ceramic pressure sensor for high-temperature applications

✍ Scribed by Fonseca, M.A.; English, J.M.; von Arx, M.; Allen, M.G.

• Book ID: 118187336
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 373 KB
• Volume: 11
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/jmems.2002.800939