Miniature pressure sensor and micromachined actuator structure based on low-temperature-cofired ceramics and piezoelectric material

✍ Scribed by P.K. Khanna; B. Hornbostel; R. Grimme; W. Schäfer; J. Dorner

• Book ID: 113780882
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 223 KB
• Volume: 87
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/j.matchemphys.2004.05.021