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Wet-oxidation effect on p-type transparent conducting CuAlO2 thin film

✍ Scribed by Dae-Sung Kim; Se-Young Choi

Book ID
105363442
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
182 KB
Volume
202
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

The wet‐oxidation effect on optical and electrical properties of CuAlO~2~ thin films was investigated with different water vapor pressures. Preferential (006) oriented films were ob‐tained after wet‐oxidation. The transmittance was 50–85% for the visible range and the optical band gap was estimated to be 3.96–4.20 eV. The p‐type nature of the films was confirmed by Hall effect measurements. The resistivity and transmittance were increased as water vapor pressure, and these phenomena were caused by the decrease of lower oxides with higher oxygen pressure. (Β© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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