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Preparation of p-type transparent conducting CuAlO2 thin films by reactive DC sputtering

✍ Scribed by A.N. Banerjee; R. Maity; K.K. Chattopadhyay

Book ID: 117357841
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 159 KB
Volume: 58
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(03)00395-1

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## Abstract The wet‐oxidation effect on optical and electrical properties of CuAlO~2~ thin films was investigated with different water vapor pressures. Preferential (006) oriented films were ob‐tained after wet‐oxidation. The transmittance was 50–85% for the visible range and the optical band gap w