✦ LIBER ✦

Wet etching X-cut LiNbO3 using diluted joint proton source

✍ Scribed by Tien-Lun Ting; Liang-Yin Chen; Way-Seen Wang

Publisher: John Wiley and Sons
Year: 2006
Tongue: English
Weight: 165 KB
Volume: 48
Category: Article
ISSN: 0895-2477
DOI: 10.1002/mop.21874

No coin nor oath required. For personal study only.

✦ Synopsis

the same as those in Ref. [5]. This is for easy comparison. The width of the slot is kept to be 2 mm, and the parameters L t , L b , and L s determine the geometry of the cross-shaped slot and affect the performances of the antenna in sequence.

📜 SIMILAR VOLUMES

Diffusion characteristics of a joint-pro

Diffusion characteristics of a joint-proton source for the wet etch of LiNbO3

✍ Tien-Lun Ting; Wen-Hung Huang; Liang-Yin Chen; Way-Seen Wang 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 284 KB

## Abstract Diffusion characteristics of a joint‐proton source for proton exchange in LiNbO~3~ are presented. With a concentration‐dependent diffusivity derived from experimental results, the diffusion process is simulated to estimate the proton‐exchanged wet‐etched depth. Good agreement between si