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Diffusion characteristics of a joint-proton source for the wet etch of LiNbO3

✍ Scribed by Tien-Lun Ting; Wen-Hung Huang; Liang-Yin Chen; Way-Seen Wang

Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 284 KB
Volume: 50
Category: Article
ISSN: 0895-2477
DOI: 10.1002/mop.23752

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✦ Synopsis

Abstract

Diffusion characteristics of a joint‐proton source for proton exchange in LiNbO~3~ are presented. With a concentration‐dependent diffusivity derived from experimental results, the diffusion process is simulated to estimate the proton‐exchanged wet‐etched depth. Good agreement between simulated and measured depth is obtained. In addition, an S‐shaped ridge waveguide is fabricated to demonstrate the improvement in power transmission efficiency. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 2736–2738, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23752

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