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Wet etching of sputtered tantalum thin films in NaOH and KOH based solutions

✍ Scribed by S. Sood; R. Peelamedu; K. B. Sundaram; E. Dein; R. M. Todi

Publisher: Springer US
Year: 2006
Tongue: English
Weight: 369 KB
Volume: 18
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-006-9053-z

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