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Wet etching of hydrogenated amorphous carbon films

✍ Scribed by Jaramillo, J.M; Mansano, R.D; Zambom, L.S; Massi, M; Maciel, H.S

Book ID: 121383330
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 213 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(00)00584-7

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