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Wavelet monitoring of spatial surface roughness for plasma diagnosis

✍ Scribed by Byungwhan Kim; Woo Suk Kim

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 427 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.02.006

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