Laser fabrication of high-aspect-ratio h
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C. Egami; Y. Liu
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Article
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2007
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Elsevier Science
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English
β 419 KB
We report on the cw-laser fabrication of sharp-edged holes and grooves in organic-dye-sensitized photoresists for g-line or i-line by manipulating its intensity and scanning rate. The laser fabrication is performed to locally control the reaction time constant of the photoresist. By scanning a tight