Kinetic critical thickness for surface w
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D.D. PerovicΒ΄; B. Bahierathan; H. Lafontaine; D.C. Houghton; D.W. McComb
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Article
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1997
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Elsevier Science
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English
β 539 KB
The kinetic critical thicknesses for surface wave formation and misfit dislocation generation in UHVCVD-grown GeSi/Si have been quantitatively determined using microscopical techniques. A refined morphological instability theory has been developed using a coupled continuum/atomistic treatment that i