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Wafer level reliability and leakage current modeling of PZT capacitors

✍ Scribed by E. Bouyssou; R. Jérisian; N. Cézac; P. Leduc; G. Guégan; C. Anceau


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
206 KB
Volume
118
Category
Article
ISSN
0921-5107

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✍ J. V. Manca; K. Croes; L. de Schepper; W. de Ceuninck; L. M. Stals; L. Jacques; 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 123 KB 👁 1 views

The in situ leakage current measurement technique is presented for the high-resolution observation of the electrical behaviour of dielectric material systems, e.g. capacitors, at high temperatures. This technique is useful for the electrical characterization of dielectrics during linear heating expe