𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Visualization of the development process in deep X-ray lithography

✍ Scribed by V. Nazmov; J. Mohr; E. Reznikova

Book ID
108223701
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
276 KB
Volume
603
Category
Article
ISSN
0168-9002

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Accuracy of structure transfer in deep X
Accuracy of structure transfer in deep X-ray lithography
✍ G. Feiertag; W. Ehrfeld; H. Lehr; A. Schmidt; M. Schmidt πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 307 KB

Deep X-ray lithography with synchrotron radiation (DXRL) constitutes the key microfabrication process step in the LIGA technology. Microcomponents with a height of some gm up to several mm can be manufactured with sub-gm precision. The pattern transfer accuracy is governed by technological constrain