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Vinylic polymerization of bicyclo[2.2.1]hept-2-ene by Co(II)-catalysis

โœ Scribed by Frank P. Alt; Walter Heitz


Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
495 KB
Volume
199
Category
Article
ISSN
1022-1352

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Synthesis and lithographic characterizat
โœ Hwang, Seok-Ho; Jung, Jae-Chang ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 130 KB ๐Ÿ‘ 1 views

A new ArF single-layer resist polymer, poly(dihydrocarveol-co-1,1-dimethylethyl bicyclo[2.2.1]hept-5-ene-2-carboxylate-co-maleic anhydride) has been synthesized by radical polymerization. The molar composition of synthesized resist polymer was conยฎrmed by elemental analysis. The obtained molar compo