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Synthesis and lithographic characterization of poly[(dihydrocarveol)-co-(1,1-dimethylethyl bicyclo[2.2.1]hept-5-ene-2-carboxylate)-co-(maleic anhydride)]

✍ Scribed by Hwang, Seok-Ho; Jung, Jae-Chang

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 130 KB
Volume: 48
Category: Article
ISSN: 0959-8103
DOI: 10.1002/(sici)1097-0126(199909)48:9<851::aid-pi228>3.0.co;2-z

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✦ Synopsis

A new ArF single-layer resist polymer, poly(dihydrocarveol-co-1,1-dimethylethyl bicyclo[2.2.1]hept-5-ene-2-carboxylate-co-maleic anhydride) has been synthesized by radical polymerization. The molar composition of synthesized resist polymer was con®rmed by elemental analysis. The obtained molar composition was 0.25:0.35:0.40. This resist polymer was found to be stable up to 230 °C, but above 250 °C it underwent rapid thermal deprotection of the tert-butyl groups by releasing carbon dioxide and 2-methylpropene. The deprotection temperature was established by DSC and TGA. Using the resist, 0.14 mm L/S pattern was obtained at 26 mJ/cm À2 doses, using an ArF stepper and the developer of 2.38 wt% tetramethyl ammonium hydroxide aqueous solution.

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