๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Vibrations of parallel arrays of electrostatically actuated microplates

โœ Scribed by Maurizio Porfiri

Book ID
104033354
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
573 KB
Volume
315
Category
Article
ISSN
0022-460X

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Dynamics of polysilicon parallel-plate e
Dynamics of polysilicon parallel-plate electrostatic actuators
โœ Patrick B. Chu; Phyllis R. Nelson; Mark L. Tachiki; Kristofer S.J. Pister ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 585 KB

The response of a polysilicon parallel-plate electrostatic actuator to a.c. signals at different bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100 "am 2 to = 0.1 mm 2) with long thin support beams (such as 600 ~m X 3 ,am ร— 1.5 ,am) are